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Spin Cleaning Device Full Auto Spinner Model JASC-150

Development solution temperature accuracy ±1℃. Compatible with φ4", φ5", and φ6" through jig replacement!

The JASC-150 model is a fully automatic spinner with a developer solution temperature accuracy of ±1°C. It accommodates φ4", φ5", and φ6" through fixture exchange. By adopting high-precision robots, it has achieved high throughput. For more details, please contact us or refer to the catalog.

  • Coater
  • Other semiconductor manufacturing equipment

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